| 
         Segment Reporting and Geographic Information (Tables)
 | 12 Months Ended | 
      
       | 
         Jun. 30, 2014 | 
      
       | Segment Reporting Information, Additional Information [Abstract] |  | 
      
       | Summary of Revenues by Geographic Region | 
         
          The following is a summary of revenues by geographic region, based on ship-to location, for the indicated periods (as a percentage of total revenues):
          
          
          
          
           
            
             
              |  |  
              |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  
              | 
                (Dollar amounts in thousands)
                | 
                Year ended June 30,
                |  
              | 
                2014
                | 
                
                | 
                2013
                | 
                
                | 
                2012
                |  
              | 
                Revenues:
                | 
                
                | 
                
                | 
                
                | 
                
                | 
                
                | 
                
                | 
                
                | 
                
                | 
                
                | 
                
                | 
                
                |  
              | 
                North America
                | 
                $
                | 
                705,159
                | 
                
 | 
                
                | 
                24
                | 
                %
                | 
                
                | 
                $
                | 
                846,125
                | 
                
 | 
                
                | 
                30
                | 
                %
                | 
                
                | 
                $
                | 
                675,034
                | 
                
 | 
                
                | 
                21
                | 
                %
                |  
              | 
                台湾
                | 
                741,470
                | 
                
 | 
                
                | 
                25
                | 
                %
                | 
                
                | 
                936,445
                | 
                
 | 
                
                | 
                33
                | 
                %
                | 
                
                | 
                872,583
                | 
                
 | 
                
                | 
                28
                | 
                %
                |  
              | 
                Japan
                | 
                334,653
                | 
                
 | 
                
                | 
                11
                | 
                %
                | 
                
                | 
                310,204
                | 
                
 | 
                
                | 
                11
                | 
                %
                | 
                
                | 
                415,475
                | 
                
 | 
                
                | 
                13
                | 
                %
                |  
              | 
                Europe & Israel
                | 
                306,779
                | 
                
 | 
                
                | 
                11
                | 
                %
                | 
                
                | 
                211,121
                | 
                
 | 
                
                | 
                7
                | 
                %
                | 
                
                | 
                323,902
                | 
                
 | 
                
                | 
                10
                | 
                %
                |  
              | 
                Korea
                | 
                371139年
                | 
                
 | 
                
                | 
                13
                | 
                %
                | 
                
                | 
                292,724
                | 
                
 | 
                
                | 
                10
                | 
                %
                | 
                
                | 
                611,462
                | 
                
 | 
                
                | 
                19
                | 
                %
                |  
              | 
                Rest of Asia
                | 
                470,208
                | 
                
 | 
                
                | 
                16
                | 
                %
                | 
                
                | 
                246,162
                | 
                
 | 
                
                | 
                9
                | 
                %
                | 
                
                | 
                273,488
                | 
                
 | 
                
                | 
                9
                | 
                %
                |  
              | 
                Total
                | 
                $
                | 
                2,929,408
                | 
                
 | 
                
                | 
                100
                | 
                %
                | 
                
                | 
                $
                | 
                2,842,781
                | 
                
 | 
                
                | 
                100
                | 
                %
                | 
                
                | 
                $
                | 
                3,171,944
                | 
                
 | 
                
                | 
                100
                | 
                %
                |  | 
      
       | Summary of Revenues by Major Products | 
         
          The following is a summary of revenues by major products for the indicated periods (as a percentage of total revenues):
          
          
          
          
           
            
             
              |  |  
              |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  
              | 
                (Dollar amounts in thousands)
                | 
                Year ended June 30,
                |  
              | 
                2014
                | 
                
                | 
                2013
                | 
                
                | 
                2012
                |  
              | 
                Revenues:
                | 
                
                | 
                
                | 
                
                | 
                
                | 
                
                | 
                
                | 
                
                | 
                
                | 
                
                | 
                
                | 
                
                |  
              | 
                Defect inspection
                | 
                $
                | 
                1,685,114
                | 
                
 | 
                
                | 
                58
                | 
                %
                | 
                
                | 
                $
                | 
                1,594,128
                | 
                
 | 
                
                | 
                56
                | 
                %
                | 
                
                | 
                $
                | 
                1,827,077
                | 
                
 | 
                
                | 
                58
                | 
                %
                |  
              | 
                Metrology
                | 
                532,002
                | 
                
 | 
                
                | 
                18
                | 
                %
                | 
                
                | 
                540,835
                | 
                
 | 
                
                | 
                19
                | 
                %
                | 
                
                | 
                675,456
                | 
                
 | 
                
                | 
                21
                | 
                %
                |  
              | 
                Service
                | 
                642,971
                | 
                
 | 
                
                | 
                22
                | 
                %
                | 
                
                | 
                595,634
                | 
                
 | 
                
                | 
                21
                | 
                %
                | 
                
                | 
                574,189
                | 
                
 | 
                
                | 
                18
                | 
                %
                |  
              | 
                Other
                | 
                69,321
                | 
                
 | 
                
                | 
                2
                | 
                %
                | 
                
                | 
                112,184
                | 
                
 | 
                
                | 
                4
                | 
                %
                | 
                
                | 
                95,222
                | 
                
 | 
                
                | 
                3
                | 
                %
                |  
              | 
                Total
                | 
                $
                | 
                2,929,408
                | 
                
 | 
                
                | 
                100
                | 
                %
                | 
                
                | 
                $
                | 
                2,842,781
                | 
                
 | 
                
                | 
                100
                | 
                %
                | 
                
                | 
                $
                | 
                3,171,944
                | 
                
 | 
                
                | 
                100
                | 
                %
                |  
          
 | 
      
       | Long-Lived Assets by Geographic Region | 
         
          Long-lived assets by geographic region as of the dates indicated below were as follows:
          
          
           
            
             
              |  |  
              |  |  |  |  |  |  |  |  |  
              | 
                
                | 
                As of June 30,
                |  
              | 
                (In thousands)
                | 
                2014
                | 
                
                | 
                2013
                |  
              | 
                长期资产:
                | 
                
                | 
                
                | 
                
                |  
              | 
                United States
                | 
                $
                | 
                219,280
                | 
                
 | 
                
                | 
                $
                | 
                207,002
                | 
                
 |  
              | 
                Europe
                | 
                19,527
                | 
                
 | 
                
                | 
                19,428
                | 
                
 |  
              | 
                Singapore
                | 
                48,938
                | 
                
 | 
                
                | 
                44,903
                | 
                
 |  
              | 
                Israel
                | 
                33,388
                | 
                
 | 
                
                | 
                27137年
                | 
                
 |  
              | 
                Rest of Asia
                | 
                9,130
                | 
                
 | 
                
                | 
                6,811
                | 
                
 |  
              | 
                Total
                | 
                $
                | 
                330,263
                | 
                
 | 
                
                | 
                $
                | 
                305,281
                | 
                
 |  |